CVD of Nonmetals by William S. Rees Jr.

By William S. Rees Jr.

Written by way of top specialists within the box, this sensible reference guide bargains an up to date, serious survey of the chemical vapor deposition (CVD) of nonmetals, a key expertise in semiconductor electronics, completing, and corrosion protection.

the fundamentals worthwhile for any CVD approach are mentioned within the creation. within the following chapters, precursor standards, with an emphasis on fabrics chemistry, universal constructions of reactants and substrates, in addition to response keep an eye on are mentioned for a vast diversity of compositions together with superconducting, engaging in, semiconducting, insulating and structural fabrics. Technological matters, resembling reactor geometries and operation parameters, are assessed and the viability of the strategy, either technically and economically, is in comparison with different innovations for the practise of skinny films.

correct fabrics and technical info are accrued in tables all through. an intensive thesaurus, record of abbreviations and acronyms, and over 1400 references around off this awesome work.

The 'CVD of Nonmetals' deals a stimulating mixture of simple techniques and sensible functions. fabrics scientists, solid-state and organometallic chemists, physicists, engineer, in addition to graduate scholars will locate this ebook of enomous worth.

Content:
Chapter 1 advent (pages 1–35): William S. Rees
Chapter 2 Superconducting fabrics (pages 37–150): Douglas L. Schulz and Tobin J. Marks
Chapter three accomplishing fabrics (pages 151–191): Tobias Gerfin and Klaus?Hermann Dahmen
Chapter four Semiconducting fabrics (pages 193–259): Gary S . Tompa
Chapter five Insulating fabrics (pages 261–319): Andrew R. Barron
Chapter 6 Structural fabrics (pages 321–366): W. Jack Lackey
Chapter 7 different fabrics (pages 367–400): Gertrud Krauter and William S. Rees

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Extra resources for CVD of Nonmetals

Example text

53 Substrates for Nb3Sn CVD . . . . . . . . . . . . . . . 54 Physical Properties of CVD-Derived Nb3Sn Films . . . . . . . 55 Nb3Ge CVD Film Growth . . . . . . . . . . . . . . . . 56 Nb3Ge CVD Precursors and Reaction Schemes . . . . . . . . 56 Nb3Ge CVD Reactor Design . . . . . . . . . . . . . . . 57 Physical Properties of CVD-Derived Nb3Ge Films . . . . . . . . 57 Effects of Chemical Doping Upon Physical Properties of CVD-Derived Nb3Ge Films .

64 V3Si CVD Film Growth . . . . . . . . . . . . . . . . 64 V3Ge CVD Film Growth . . . . . . . . . . . . . . . . 65 Nb3Ga CVD Film Growth . . . . . . . . . . . . . . . . N. CVD Film Growth . . . . . . . . . . . . . . . Ge. CVD Film Growth . . . . . . . . . . . . . . . 66 Ta CVD Film Growth . . . . . . . . . . . . . . . . . 66 LTS Film Growth by CVD of Hydrides and Organometallics on HotWires .

66 LTS Film Growth by CVD of Hydrides and Organometallics on HotWires . . . . . . . . . . . . . . . . . . . . 66 Thermodynamic Analysis of LTS CVD . . . . . . . . . . . 67 CVD of HTS Materials . . . . . . . . . . . . . . . . 67 CVD Precursor Design Strategies for HTS Materials . . . . . . 68 Metal P-Diketonate Complexes for HTS CVD . . . . . . . . 69 Limitations of Alkaline Earth /%Diketonate Complexes for HTS CVD . 71 New Barium Precursors for CVD of HTS Materials .

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